The TohoSpec 3100 is a low cost film thickness measurement system that utilizes a modern small spot spectroscopic reflectometer built on a simple-to-use tabletop platform. Incorporating core technology acquired from market leader Nanometrics, this system is specifically designed for a wide variety of R&D applications. The reliable solid state linear diode array provides fast, precise measurements of single-layer films such as oxide, nitride and photo-resist, as well as the top layer on film stacks of up to 3 layers in the thickness range of 100Å to 30µm. An outstanding value, complete with up to 15 standard film thickness measurement algorithms, this rugged and accurate system is used in laboratories worldwide to provide precision film thickness measurements in a compact design.
The TohoSpec 3100 is a state of the art, small spot spectroscopic reflectometer, built on a simple-to-use tabletop platform. A reliable solid state linear diode array is used to ensure measurement speed and accuracy. Incorporating core technology acquired from market leader Nanometrics, this system is specifically designed for a wide variety of R&D applications. The TohoSpec 3100’s Windows software interface is easy to use, and is supplied with a suite of measurement programs that handle most semiconductor films. The flexible software design makes it simple for the engineer to customize measurement programs and recipe jobs for more advanced applications. The TohoSpec 3100 delivers the same trusted results as its predecessors while offering the user enhanced versatilityand data management.
TohoSpec 3100 is designed to provide accurate film thickness measurements within a vast array of applications.
Guaranteed 3 layer measurement and in some cases beyond 3 depending on parameters. Measures most smooth or semi-smooth surfaces with some reflectance
- Power Device
- Magnetic head for HDD
Please contact us for further information.